Fast scanning of nanolithography pattern on Ti film, 3×3 microns
- Friday Oct 30,2009 12:50 PM
- By yalovenko
- In Fast scanning, News
Local anodic oxidation on Ti film using the vector SPM nanolithography technique. Image size 3×3 µm, line height 3 nm, 400×400 points.
The scanning rate is changing from 40 Hz down to 5 Hz!
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