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AIST-NT presents the new achievement in fast scanning technology using the combination of SmartSPM™ scanner, NanoWorld ArrowTM UHF (ultra high frequency) silicon probe and AIST-NT’s MagicScan™ technology.
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Local anodic oxidation on Ti film using the vector SPM nanolithography technique. Image size 3×3 µm, line height 3 nm, 400×400 points.
The scanning rate is changing from 40 Hz down to 5 Hz!
AFM image of Test Grating (3 microns pitch, 25 nm height), semicontact AFM mode, probe resonance frequency – 500 kHz, 30х30 microns scan area, 400×400 points. Scan rate increases from 2 to 20 lines per second.
AFM image of Test Grating (3 microns pitch, 25 nm height), semicontact AFM mode, probe resonance frequency – 500 kHz, 12х12 microns scan area, 300×300 points. Scan rate increases from 3 to 30 lines per second.