Nanolithography

  • Local anodic oxidation nanolithography on GaAs. 2,9 x 2,9 microns scan.
    Nanolithography
    Local anodic oxidation nanolithography on GaAs. 2,9 x 2,9 microns scan.
  • Local anodic oxidation vector nanolithography on CoCr film. 4 microns scan.
    LAO lithography
    Local anodic oxidation vector nanolithography on CoCr film. 4 microns scan.
  • Dynamic force lithography on polymer film. 1,9 microns scan.
    Force nanolithography
    Dynamic force lithography on polymer film. 1,9 microns scan.
  • Local anodic oxidation nanolithography on GaAs film, 400 nm scan.
    LAO nanolithography
    Local anodic oxidation nanolithography on GaAs film, 400 nm scan.
  • Dynamic force nanolithography on polycarbonate film of DVD RW disc.
    Force nanolithography (nanoscratching)
    Dynamic force nanolithography on polycarbonate film of DVD RW disc.