Nanolithography
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NanolithographyLocal anodic oxidation nanolithography on GaAs. 2,9 x 2,9 microns scan.
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LAO lithographyLocal anodic oxidation vector nanolithography on CoCr film. 4 microns scan.
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Force nanolithographyDynamic force lithography on polymer film. 1,9 microns scan.
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LAO nanolithographyLocal anodic oxidation nanolithography on GaAs film, 400 nm scan.
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Force nanolithography (nanoscratching)Dynamic force nanolithography on polycarbonate film of DVD RW disc.