SmartSPM™ specifications

Measuring Modes

Scanner and Base

-       0.1nm RMS in XY dimension in 200Hz bandwidth with capacitance sensors on;

-       0.02nm RMS in XY dimension in 100Hz bandwidth with capacitance sensors off;

-       <0.04nm RMS Z capacitance sensor in 1000Hz bandwidth;

AFM Head HE001

AFM Head HE002*

Liquid cell (optional)

Liquid cell with temperature control (optional)

Conductive AFM unit (optional)

Optical access

Compatibility with optical systems

-       Manual positioning range 2×2x2 mm;

-       Piezo positioning range 10×10x10 um, capacitive sensors.

Optical microscope (optional)

Vibration isolation (optional)

Controller electronics

Software

Computer

Specifications are subject to change without notice.