Fast scanning, new achievements: High quality noncontact measurements of HOPG with scan rates up to 70 Hz

AIST-NT presents the new achievement in fast scanning technology using the combination of SmartSPM™ scanner, NanoWorld ArrowTM UHF (ultra high frequency) silicon probe and AIST-NT’s MagicScan™ technology.

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    • Fast scanning of nanolithography pattern on Ti film, 3×3 microns


    Local anodic oxidation on Ti film using the vector SPM nanolithography technique. Image size 3×3 µm, line height 3 nm, 400×400 points.

    The scanning rate is changing from 40 Hz down to 5 Hz!

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