AFM image of Test Grating (3 microns pitch, 25 nm height), semicontact AFM mode, probe resonance frequency – 500 kHz, 30х30 microns scan area, 400×400 points. Scan rate increases from 2 to 20 lines per second.

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AFM image of Test Grating (3 microns pitch, 25 nm height), semicontact AFM mode, probe resonance frequency – 500 kHz, 12х12 microns scan area, 300×300 points. Scan rate increases from 3 to 30 lines per second.

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